Agilent Technologies 5DX - Z-Axis Stepper Motors

Agilent 5DX Service Guide 5-19
5DX Series 3 XYZ Stage Assembly
Z-Axis Stepper Motors
The Z-Axis Stepper Motors are used to move each panel reference point through
the vertical Z-Axis plane during the panel test process. The Z-Axis Stepper Motors
are mounted on the Y-Axis stage of the XYZ Stage Assembly. Each Z-Axis
Stepper Motor has a precision recirculating ball lead screw that is used to raise and
lower the panel thorough the Plane of Focus.
The Z-Axis Stepper Motors receive their drive signals from the amplifiers located
in the Motion Control Assembly and their control signals from Motion Controller
PCI #1.
Homing the Z-Axis is achieved by driving the Z-Axis down onto its hard stops to
square the Z-Axis, and then stepping up a predefined number of counts. The
resultant position is defined in the xyz.cfg file as the Z-Axis zero or home position.
Figure 5-10: Z-Axis Stepper Motors
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Z-Axis Stepper
Motors
XYZ Stage Assembly Top Down View showing the
locations of the Z-Axis Stepper Motors.