Agilent 5DX Service Guide 6-3
5DX Series 3 Pneumatic Subsystem Components
Pneumatic Subsystem Components
The Pneumatic Subsystem consists of the following components:
• Pneumatic Gauge, Regulator, and Filter Assembly — Provides the entry point,
pressure regulation, and filtration for compressed air into the Pneumatic
Subsystem.
• Safety Valve — Provides control for the pneumatics for the inner and outer
barriers
• Stage Air Controller — Provides control of the panel clamps and board stops
In this section...
This section includes the following topics:
n Pneumatic Gauge, Regulator, and Filter Assembly, 6-4
n Main Safety Valve, 6-6
n Internal Manifold, 6-7
n Inner Barrier, 6-8
n Barrier Operation, 6-11
n Adjusting the Air Cylinder, 6-14
n Other Inner Barrier Components, 6-15
n Adjustment/Replacement of the Inner Barrier Encoder, 6-16
n Setting the Positions for the Encoder, 6-20
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