10-42 Maintenance
Software Diagnostics 5DX Series 3
Software Diagnostics
Check the Inner Barrier Encoders
Maintenance Frequency: Monthly
Estimated Time: Five minutes
Required Items:
None
Prerequisite:
Position the main stage Z axis to the load/unload position. (Approximately 400mil
inches.) From the Calib directory, copy the machine.cfg file to machine.bak.
Procedure:
1. Select XYZ Stage > Inner Barrier Setup from the Service menu and press
Enter.
2. Accept the recommended defaults when prompted.
3. Compare the new inner barrier encoder positions in machine.cfg to the encoder
positions recorded in machine.bak.
The encoders are good and the inner barrier is operating normally if the
difference in the new and old positions is less than four counts. If it is greater
than four counts, call the Agilent Response Center for assistance.
4. Return the system to normal operations.
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