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Agilent Technologies 5DX - Surface Map Subsystem Components; Surface Map Laser

Agilent Technologies 5DX
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7-6 Surface Map Subsystem
Surface Map Subsystem Components 5DX Series 3
considered to be adjusted to the ideal Plane of Focus. Confirmation is
accomplished once at the
400 FOV and from then on the adjustments for other
FOV settings (for example, 200, 320, 650 and 800) are determined by adding or
subtracting a predetermined offset value to acquire the correct panel positioning
data.
Surface Map Subsystem Components
In this section...
This section describes the following topics:
n Surface Map Laser, 7-6
n Laser Theory of Operation, 7-8
n Laser View Camera, 7-9
n Panel View Camera., 7-10
Surface Map Laser
The Surface Map Laser performs the function of providing Surface Map data for
each panel reference point prior to its test sequence. Mapping each panel reference
point compensates for variations in the manufacture of each panel reference point
(for example, thickness, flatness, and warpage). This mapping data is used to
locate the actual physical location of a desired slice to be analyzed.
WA R N I NG The Laser emits a medium energy laser light. This light is intense enough to
cause severe eye injury. The laser light is not in the visible light spectrum.
Do not look directly into any laser light emitting source or attempt to
bypass the safety interlocks that safeguard this system
127( The laser safety interlocks are identical to that of the X-ray system.
At no time can the laser function with any access panel open.

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