7-2 Surface Map Subsystem
Overview 5DX Series 3
Overview
The Surface Map Subsystem is one of the more complex subsystems within the
Agilent 5DX System. A discussion of the Surface Map Subsystem would not be
complete without discussing the following:
• XYZ Panel Orientation (Loaded) — When a panel is loaded into the 5DX
System, there could be a slight amount of rotational skew. To compensate for
the rotational skew, a process called Panel Alignment is used.
• Surface Map — Used to adjust the horizontal positioning to compensate for the
manufacturing imprecision and warping of each panel.
This chapter will cover these topics and provide a further discussion of the Surface
Map Subsystem Components.
XYZ Panel Orientation (Loaded)
The first step after loading the panel into the 5DX System is to identify the
orientation of the panel on the XYZ Stage Assembly. Optical Encoders provide the
X and Y panel orientation in reference to the X-Axis and Y-Axis servomotors to
the nearest nanometer (10
-9
meter). This value is used as a comparative reference
while calculating the rotational skew (offset) of a loaded panel.
In this section...
This section describes the following topics:
n Panel Alignment, 7-3
n Alignment Accuracy, 7-3
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