Agilent Technologies 5DX - Main Safety Valve

6-6 Pneumatic Subsystem
Pneumatic Subsystem Components 5DX Series 3
Main Safety Valve
This valve provides low pressure air to the Inner Barrier’s Air Cylinder which puts
the Inner Barrier in the open position. In this position, the XYZ Stage Assembly
can move without hitting the Inner Barrier.
Figure 6-2: Main Safety Valve
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