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Agilent Technologies 5DX - Introduction

Agilent Technologies 5DX
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6-2 Pneumatic Subsystem
Introduction 5DX Series 3
Introduction
The Pneumatic Subsystem provides a computer-controlled air supply used to
operate the following components:
Panel Clamps There are two panel clamps on the XYZ Stage Assembly.
Pneumatics are used to actuate the panel clamps that hold the panel in place
while it is under test.
Inner and Outer Barriers There is an inner barrier and one or two outer
barriers. Pneumatics are used to operate the inner and outer barriers.
Panel Mechanical Stop The panel mechanical stop(s) is/are located on the
stationary panel rail of the XYZ Stage Assembly. Pneumatics are used to
extend and retract the panel mechanical stop(s).

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