Agilent 5DX Service Guide 5-13
5DX Series 3 Panel Handling Subsystem Components
Panel Handling Subsystem Components
The following components and assemblies make up the Panel Handling
Subsystem:
n X-ray Cabinet and Barriers, 5-14
n XYZ Stage Assembly, 5-16
n Motion Control Assembly, 5-28
n Motion Controller PCI Cards, 5-38
n Digital I/O Assembly, 5-42
n Panel Handling Software, 5-51