5-18 Panel Handling Subsystem
XYZ Stage Assembly 5DX Series 3
The X-Axis and Y-Axis Servomotors receive their drive signals from the Servo
Modules located in the Motion Control Assembly and their control signals from
Motion Controller PCI #1.
Figure 5-9: X-Axis and Y-Axis Servomotors
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X-Axis and Y-Axis
Servomotor
XYZ Stage Assembly Top Down View showing the
locations of the X-Axis and Y-Axis Servomotors.
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