213
Measurement Range and Accuracy
The range of measurement levels for which accuracy is guaranteed varies with the setting condi-
tions.
Guaranteed accuracy measurement level range
Range
Sample's
imped-
ance
Measurement frequency
DC
4 Hz to
99.99 Hz
100 Hz to
999.99 Hz
1 kHz to
10 kHz
10.001 kHz
to 100 kHz
100.01 kHz
to 1 MHz
1.0001 MHz
to 5 MHz
5.0001 MHz
to 8 MHz
100 M
Ω
8 M
Ω
to
200 M
Ω
1 V (xed)
0.101 V to 5 V
10 M
Ω
10 M
Ω
to
100 M
Ω
0.101 V to 5 V
800 k
Ω
to
10 M
Ω
0.101 V to 5 V
0.501 V
to 5 V
1 M
Ω
1 M
Ω
to
10 M
Ω
0.101 V to 5 V
0.501 V
to 5 V
80 k
Ω
to
1 M
Ω
0.050 V to 5 V
0.101 V
to 5 V
0.501 V
to 5 V
100 k
Ω
100 k
Ω
to
1 M
Ω
0.050 V to 5 V
0.101 V
to 5 V
0.501 V
to 5 V
8 k
Ω
to
100 k
Ω
0.010 V to 5 V
0.050 V
to 5 V
0.101 V
to 1 V
10 k
Ω
10 k
Ω
to
100 k
Ω
0.010 V to 5 V
0.050 V
to 5 V
0.101 V
to 1 V
800
Ω
to
10 k
Ω
0.010 V to 5 V
0.050 V
to 5 V
0.050 V
to 1 V
0.101 V
to 1 V
1 k
Ω
1 k
Ω
to
10 k
Ω
0.010 V to 5 V
0.050 V
to 5 V
0.050 V
to 1 V
0.101 V
to 1 V
80
Ω
to
1 k
Ω
0.010 V to 5 V
0.050 V
to 1 V
0.101 V
to 1 V
100
Ω
8
Ω
to
100
Ω
0.010 V to 5 V
0.050 V
to 1 V
0.101 V
to 1 V
10
Ω
800 m
Ω
to 10
Ω
0.050 V to 5 V 0.101 V to 1 V
1
Ω
80 m
Ω
to
1
Ω
0.050 V to 5 V
0.101 V
to 5 V
0.501 V to 1 V
100 m
Ω
1 m
Ω
to
100 m
Ω
0.101 V to 5 V
0.501 V
to 5 V
The accuracy guarantee range during DC bias operation is 10 m
Ω
or greater.
The accuracy for DC resistance (Rdc) measurement is guaranteed only when offset values are
acquired.
The guaranteed accuracy range varies with the sample’s impedance.
10
Specications