Agilent 5DX Service Guide 10-25
5DX Series 3 Main Cabinet Maintenance
4. Call the Agilent Response Center if any of the following conditions exist:
• VacIon Pump sense voltage exceeds 20 millivolts.
• Current LED is not illuminated on the Focus Coil Power Supply.
• Focus Coil current has changed.
Otherwise, return the 5DX System to operation.
Figure 10-9: VacIon Pump Monitor Pressure vs. Voltage Chart
PUMP MONITOR (J0400) IN MILLIVOLTS
PRESSURE AT PUMP IN TORR (mmHg)
1.0E-04
1.0E-05
1.0E-08
1.0E-06
1.0E-07
1 10 100 1000 10000
NORMAL
NORMAL
CAUTION
CAUTION
HIGH
HIGH
AUXILIARY POWER SUPPLY SERVICE RECORD:
Pump Monitor Voltage: ______mV Pressure: ____Torr
Focus Coil: ______Volts @ ______Amps
Date: ____/____/____ Technician Name: ____________
DANGER
HIGH VOLTAGE!