10-34 Maintenance
Main Cabinet Maintenance 5DX Series 3
Information:
Figure 10-10: XYZ Stage Assembly (Exploded View)
Procedure:
1. Open all access panels to expose the XYZ Stage.
2. Inspect the one X-Axis lead screw, the two Y-Axis lead screws and four Z-Axis
lead screws for damage, wear, or debris. Refer to Figure 10-10 for the proper
locations. Wipe any contaminated lubricant or foreign matter from the screws
as required. The lead screws should have a uniform coating of lubricant over
their operational area.
3. Inspect the interior compartments for dust and debris. Use tweezers or needle-
nose pliers to remove any large accumulations. If necessary, use a vacuum
cleaner to remove the accumulated dust. Pay particular attention to cleaning
the fans and ventilation ports.
4. Apply the grease to the dry areas of the X-Axis and Y-Axis lead screws and
remove any excess.
5. Apply a small amount of grease to each of the Z-Axis lead screws and remove
any excess.
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