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AIXTRON CRIUS II - System Identification; Type Label

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crius_II_en_00, Edition 06/2010
10 CONFIDENTIAL AIXTRON - Dokumentation
Use, data System Manual
System identification CRIUS II
1
1.4 System identification
1.4.1 Type label
The type labels identify the specific system and includes details of any cus-
tomer-specific adaptations.
State all details shown on the type label when you contact AIXTRON. When-
ever possible, also state the displayed software sequence step when you
make diagnosis inquiries in the event of disturbances. This ensures fast and
optimum support.
The following type labels are attached to the CRIUS II:
System type label
Details of the system
Heater type label
Details of the heater
Fig. 1-1, 10 and Fig. 1-2, 10 show the type labels.
Fig. 1-1 System type label
Fig. 1-2 Heater type label

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