AIXTRON CRIUS II - Lockout;Tagout (LOTO)

crius_II_en_00, Edition 06/2010
142 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Lockout/tagout (LOTO) CRIUS II
6
6.4 Lockout/tagout (LOTO)
«Lockout/Tagout» is a safe method to switch off machinery and equipment
and safeguard personnel from unexpected energization or startup.
• Lockout = Switch off and lock
• Tagout = Label
Refer to Chapter 2.7 Lockout/Tagout-Prozedur,  37 for general description of
the LOTO procedure.
LOTO positions Fig. 6-2,  142 shows the LOTO positions of the CRIUS II.
Fig. 6-2 LOTO positions: Front and back view (top), top view (bottom)
NOTE:
The following figure shows the LOTO positions of a typical CRIUS II.
Your specific system may differ from this in certain details. Always refer
to the delivered installation plan.
A Main switch - system and PSU
B Gas interface
C Pneumatic maintenance unit
D Water connections
E Reactor