AIXTRON CRIUS II - Checking Elastomer Seals; Information on Elastomer Seals; Materials

crius_II_en_00, Edition 06/2010
144 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Information on elastomer seals CRIUS II
6
6.5 Information on elastomer seals
There are two basic types of ring-shaped elastomer seals:
• Sealing ring: Elastomer cord whose ends have been glued or vulcanized
together
• O-ring: Molded as one piece
6.5.1 Materials
Most elastomer seals are made of the following materials:
Tab. 6-13 Common elastomer seal materials
Solvents
6.5.2 Checking elastomer seals
1 Remove the seal from the sealing groove
Visual inspection 2 Inspect the seal. It must be:
• Regular in diameter
• Free from noticeable gluing joints
• Free from any damage, such as cuts or swellings. See Fig. 6-3,
 145.
Trade name Abbreviation Material
Temperature
range
Buna-N, Perbu-
nan
NBR Nitrile rubber -30…+100 °C
Viton FKM, FPM Fluorocarbon
rubber
-20…+200 °C
Kalrez FFKM, FFPM Perfluorocar-
bon rubber
-15…+230 °C
WARNING! Unsuitable solvents.
Acetone, methanol and ethanol are unsuitable solvents. These chemi-
cals attack seals made of nitrile and fluorocarbon rubber (e.g. Perbunan
and Viton). In addition, methanol is toxic.
Avoid these solvents. Use isopropanol instead.
NOTE:
Be careful not to scratch the seal or the groove. Never use hard tools
(e.g. screwdriver) to remove a seal.