crius_II_en_00, Edition 06/2010
156 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Glove box CRIUS II
6
6.9.3 Cleaning the pump filter
1 Open the corresponding door to access the glove box pump
Fig. 6-15 Glove box pump
2 Open the KF clamp at the glove box pump
3 Remove the filter
Fig. 6-16 Removing the pump filter
A Position of the filter
BKF clamp
CPump
4 Blow out the filter grid with compressed air and clean it with alcohol
WARNING! Hazardous process gases.
The vacuum system may contain hazardous gases which can be detri-
mental for your health.
Always wear a gas mask, gloves and industrial clothing with long
sleeves when opening parts of the vacuum system. Read the safety data
sheets for the gases and follow all instructions.
To Next Page