crius_II_en_00, Edition 06/2010
134 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Introduction CRIUS II
6
6.1.7 RMA (Return Material Authorization)
For returning defective parts to AIXTRON please use the so-called RMA pro-
cedure. Contact your local AIXTRON subsidiary. You will get a password to
perform the RMA procedure online.
6.1.8 Safety
Before you perform any maintenance work at the CRIUS II, you must have
read and fully understood Chapter 2 Safety, 17. Pay attention to all hazard
alerts in Chapter 2.4 Danger areas for operating personnel, 24 and
Chapter 2.5 Danger areas for maintenance and service personnel, 25.
6.1.9 Maintenance mode
You must switch the CRIUS II to the maintenance mode to carry out certain
maintenance work. See Chapter 5.1.5 Key switch for operating mode, 114.
WARNING! Hazardous materials.
The vacuum system may contain hazardous materials which can be det-
rimental for your health.
Purge the system with nitrogen about 24 hours before opening parts
(e.g. gas pipes, reactor, etc.) that had contact with hazardous materials.
CAUTION! Fingerprints.
Fingerprints in the glove box and in the reactor may impair the process.
Prevent the glove box and the reactor from contamination. Put on clean
room gloves before you touch any parts in these components.
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