AIXTRON CRIUS II - Maintenance Schedule: Low Power Supply; Maintenance Schedule: Main Power Supply; Maintenance Schedule: SCS

crius_II_en_00, Edition 06/2010
138 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Maintenance schedule CRIUS II
6
6.3.1 Maintenance schedule: Main power supply
Tab. 6-2 Maintenance schedule: Main power supply
6.3.2 Maintenance schedule: Low power supply
Tab. 6-3 Maintenance schedule: Low power supply
6.3.3 Maintenance schedule: SCS
Tab. 6-4 Maintenance schedule: SCS
Action Interval Comments
Date and signa-
ture
Checking the main switch Monthly See Chapter 6.7.2,  149
Checking the fuses Quaterly See Chapter 6.7.3,  151
Checking the over-current cir-
cuit breakers
Quaterly See Chapter 6.7.4,  151
Checking the EMERGENCY-
OFF buttons
Quaterly See Chapter 6.7.5,  152
Action Interval Comments
Date and signa-
ture
Checking the low power
supply
Quaterly See Chapter 6.8.1,  153
Checking the fuses Quaterly See Chapter 6.8.2,  154
Action Interval Comments
Date and signa-
ture
Checking the Cause/Effect
diagram
Half-yearly Please contact your local
AIXTRON service center for
more information
Checking the Enable Table Half-yearly Please contact your local
AIXTRON service center for
more information