AIXTRON CRIUS II - Vacuum Diagrams

AIXTRON - Dokumentation CONFIDENTIAL 87
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Vacuum system
3.8.2 Vacuum diagrams
The following table lists the symbols which are used to specify the components
in vacuum diagrams.
Tab. 3-1 Symbols used in the vacuum diagrams
Symbol Meaning
Manual valve
Check valve
High-vacuum valve
Pneumatic valve
Solenoid/pneumatic valve
Throttle valve
Filter
Pressure transducer
PV
EPV
M
PT
NOTE:
The following figures show the vacuum diagrams of a typical CRIUS II.
Your specific system may differ from this in certain details. Always refer
to the delivered vacuum diagrams.