AIXTRON - Dokumentation CONFIDENTIAL 59
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Glove box
3.3 Glove box
The reactor is installed in the glove box in which pure argon or nitrogen are
used. This protects the reactor from contaminations during loading/unloading
and when maintenance is performed. Use the integrated gloves to access the
operating elements inside of the glove box.
Fig. 3-4 Glove box
A EMERGENCY-OFF button
BGlove
C PROCESS-STOP button
D Control panel
E Handle for opening the glove box
F Reactor
G Lock
H [OPEN] and [CLOSE] buttons for reactor
To Next Page
Loading...