crius_II_en_00, Edition 06/2010
92 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Media supply CRIUS II
3
3.9 Media supply
The media supply of the CRIUS II comprises:
• Water supply, see Chapter 3.9.1, 92
• Pneumatic supply, see Chapter 3.9.2, 96
3.9.1 Water supply
The following table lists the symbols which are used to specify the components
in the water diagrams.
Symbol Meaning
Manual valve
Drain valve
Check valve
Manual valve with drain
Manual valve with check valve and drain
Electromagnetic valve
Pneumatic valve
Manometer
Flow meter with flow limiter
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