AIXTRON - Dokumentation CONFIDENTIAL 93
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Media supply
Tab. 3-2 Symbols used in the water diagrams
The cooling water supply consists of three circuits that are shown in the follow-
ing diagrams. For details refer to the delivered «Cooling System» drawing.
Filter with pressure setting and purge system
Thermometer
Pump
Symbol Meaning
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