AIXTRON - Dokumentation CONFIDENTIAL 121
5
crius_II_en_00, Edition 06/2010
System Manual Operation
CRIUS II Operating elements: Reactor
5.3.5 Pressure control unit for throttle valve
The pressure control unit controls the position of the throttle valve and, in turn,
the pressure in the reactor. The unit can be operated either directly («Local»)
or via the software («Remote»).
Fig. 5-19, 121 shows the front side of the pressure control unit with operat-
ing and display elements.
For operation please refer to the corresponding OEM manual.
Fig. 5-19 Pressure control unit
5.3.6 Temperature control unit
The temperature control unit is located at the reactor cabinet. It consists of the
following controllers:
Eurotherm The Eurotherm temperature controller controls the reactor temperature.
Fig. 5-20 Eurotherm controller
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