AIXTRON CRIUS II - Double O-Ring System (DOR)

crius_II_en_00, Edition 06/2010
68 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Reactor CRIUS II
3
3.5.5 Double O-ring system (DOR)
The DOR system consists of two O-rings: The inner O-ring and the outer O-
ring. The intermediate volume is pumped continuously to ensure reliable and
controllable sealing.
Fig. 3-17,  68 shows the position of the DOR system.
Fig. 3-17 Position of the DOR system
A DOR: Sealing between reactor lid and reactor chamber