crius_II_en_00, Edition 06/2010
58 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
System overview CRIUS II
3
3.2 System overview
Fig. 3-3, 58 shows the main components of the CRIUS II.
Fig. 3-3 Design of the CRIUS II (example)
A Gas mixing cabinet
B Reactor cabinet
C Heater power supply unit
D Heat exchanger
E Transformer
NOTE:
The figure shown below relates to a typical CRIUS II system. Your spe-
cific system may differ from this in certain details.
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