AIXTRON CRIUS II - Main Switch; Operating Elements: Heating

crius_II_en_00, Edition 06/2010
122 CONFIDENTIAL AIXTRON - Dokumentation
Operation System Manual
Operating elements: Heating CRIUS II
5
5.4 Operating elements: Heating
5.4.1 Main switch
Fig. 5-21,  122 shows the main switch of the heater supply unit.
Fig. 5-21 Main switch
Switch positions «O» (OFF)
In this position the system is switched off completely.
«I» (ON)
In this position the system can be switched on.
WARNING! Primary side of main switch.
Parts inside of the supply rack may be connected to the primary side of
the main switches. These parts are always live. Touching these parts will
cause an electric shock. The shock may be lethal.
Prior to any work in the danger area:
• Lock out and tag out the power lines leading to the supply rack
• Ground the equipment
• Check to make sure that no one is in the danger area before you ener-
gize the supply rack again