crius_II_en_00, Edition 06/2010
76 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Gas system CRIUS II
3
3.6.5 MO source
An MO source uses metal organic compounds, either in liquid or solid state.
They are provided from containers made of stainless steel (bubbler) which are
passed by a carrier gas. The bubblers are mounted in thermostat heat baths.
See Fig. 3-24, 76.
Several thermostat heat bath types are available. For more information refer
to the related OEM manual.
Fig. 3-24 Thermostat heat bath (example)
A Operating unit
Use the following parameters to control the concentration of the metal organic
compounds in the carrier gas:
• Temperature of the bubbler
• Carrier gas flow through the bubbler
• Pressure in the bubbler
The following versions of the MO source are available:
• Standard MO source
• Standard MO source with double bubbler
• Doping MO source
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