AIXTRON - Dokumentation CONFIDENTIAL 11
1
crius_II_en_00, Edition 06/2010
System Manual Use, data
CRIUS II Dimensions and weight
1.5 Dimensions and weight
1.5.1 Dimensions
Fig. 1-3 Dimensions of the CRIUS II [mm]; Side view and top view
A Gas mixing cabinet
B Reactor cabinet
C Heater power supply unit
D Heat exchanger
E Transformer
NOTE:
The technical data stated here may differ from the information in the
installation plan. If this is the case, the data contained in the installation
plan are binding.
To Next Page
Loading...