AIXTRON CRIUS II - Electrical Supply

AIXTRON - Dokumentation CONFIDENTIAL 83
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Electrical supply
3.7 Electrical supply
Front Fig. 3-33,  83 and Fig. 3-34,  83 show the front side of the electrical cabinet.
Fig. 3-33 Electrical cabinet 1 (front side)
Fig. 3-34 Electrical cabinet 2 (front side)
ASCS
B Fuses for low power supply
C Low power supply