AIXTRON - Dokumentation CONFIDENTIAL 13
1
crius_II_en_00, Edition 06/2010
System Manual Use, data
CRIUS II Installation data
1.6 Installation data
For installation data refer to the installation plan.
1.6.1 Amperes interrupting capacity (AIC)
The main switch of the CRIUS II can break a fault current of 35 kA.
1.6.2 Environmental conditions
The CRIUS II is for use within a clean room environment, at an operating tem-
perature of approx. 25 °C and a relative humidity of approx. 60 % (not higher
than 80 %).
Tab. 1-2 Environmental conditions
1.6.3 Pneumatic supply
The pneumatic supply is recommended to be a low purity N
2
supply, to prevent
any oxygen entering the hydrogen lines in the unlikely event of a valve leaking
its pneumatic feed over the valve stem.
NOTE:
The technical data stated here may differ from the information in the
installation plan. If this is the case, the data contained in the installation
plan are binding.
Amperes interrupting capacity 35 kA
Storage During operation
Temperature 10…50 °C 15…25 °C
Relative humidity 30…80 %
(non-condensing)
45…80 %
(non-condensing)
NOTE:
Prevent condensation! The temperature of the pneumatic supply must
exceed the dew point of the ambient air by at least 2
°C. See Fig. 1-4,
14.
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