AIXTRON CRIUS II - Stainless Steel Parts

crius_II_en_00, Edition 06/2010
148 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Cleaning procedures CRIUS II
6
6.6.4 Stainless steel parts
Solutions
AIXTRON recommends a Sodium Hydroxyde solution on systems growing
Arsenides.
If grown layers are predominantly Phosphides AIXTRON recommends to use
a solution of orthophosphoric acid (30%) and hydrogen peroxide (30%) in DI
water.
H
2
O : NaOH 10 : 1 or
H
2
O : H
3
PO
4
: H
2
O
2
8 : 1 : 1