AIXTRON - Dokumentation CONFIDENTIAL 175
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Gas system
24 Repeat the pump/purge cycle at least five times using N
2
25 Switch the system to H
2
26 Repeat the pump/purge cycle at least five times using H
2
27 Close the MO vac valve
28 Open both quarter turn valves (item H in Fig. 6-35, 173) on the source
manifold to the MO vac line to allow equalization between bubbler inlet
and outlet
29 Open the 4/2-way MO source valve in AIXACT
30 Reset the pressure controller from 2000 mbar to 1000 mbar and let the
pressure equalize
31 Close both quarter turn valves (item H in Fig. 6-35, 173) on the source
manifold to the MO vac line
32 Close the 4/2-way MO source valve in AIXACT
33 Set all MFCs to normal operating state (default)
34 Return to operation mode
35 For opening the bubbler (manual valves) please refer to the OEM of the
bubbler or contact your local AIXTRON service center
The source connection lines are now filled with pure hydrogen at atmospheric
pressure. The source is operational once the temperature in the bath has sta-
bilized.
6.13.3 Checking the communication
1 Enter a flow set value for a mass flow controller in AIXACT
2 Observe the actual flow value displayed in AIXACT
• The actual value must automatically reach the set value
3 Check the pressure controllers in the same way
To Next Page
Loading...