crius_II_en_00, Edition 06/2010
108 CONFIDENTIAL AIXTRON - Dokumentation
Installation System Manual
Checks CRIUS II
4
4.7 Checks
4.7.1 Final inspection
The safety- and interlocking functions must be demonstrated when the
CRIUS II is handed over to the end user. The CRIUS II must be ready for oper-
ation and must have been successfully subjected to previous operational and
functional testing.
Both end user and AIXTRON service technician must provide written confir-
mation (acceptance report) that safety-related, precautionary devices are
functioning correctly.
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