AIXTRON - Dokumentation CONFIDENTIAL 25
2
crius_II_en_00, Edition 06/2010
System Manual Safety
CRIUS II Danger areas for maintenance and service personnel
2.5 Danger areas for maintenance and service
personnel
2.5.1 Dangers originating from electric power
Fig. 2-2 Danger areas for maintenance and service personnel: Electric power
A Gas mixing cabinet
B Reactor cabinet
C Heater power supply unit
D Heat exchanger
E Transformer
WARNING! High voltage.
The system contains parts which carry levels of high voltage. Touching
these parts will cause an electric shock. The shock may be lethal.
Prior to any work in the danger area:
• Lock out and tag out the main power supply (system main switch and
heater main switch)
• Ground the equipment
• Check to make sure that no one is in the danger area before you
switch the system on again
To Next Page
Loading...