AIXTRON CRIUS II - Load Lock; Load Lock Chamber

crius_II_en_00, Edition 06/2010
60 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Load lock CRIUS II
3
3.4 Load lock
3.4.1 Load lock chamber
Substrates are transported into the glove box via the load lock. The load lock
chamber comprises two doors: The outer door is used to load and unload sub-
strates. See Fig. 3-5,  60. The inner door is used to transfer substrates
between load lock chamber and glove box. See Fig. 3-5,  60.
Fig. 3-5 Load lock
A Inner lock chamber door
BDrawer
C Outer lock chamber door