crius_II_en_00, Edition 06/2010
166 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Vacuum system CRIUS II
6
6.11.4 Checking the throttle valve
1 Open the reactor cabinet to access the vacuum system
2 Open the KF clamps and remove the throttle valve
Fig. 6-26 Throttle valve
Fig. 6-27, 166 shows the removed throttle valve.
Fig. 6-27 Throttle valve (removed)
3 Loosen both fastening screws of the seal plate. See Fig. 6-28, 167.
4 Remove the seal plate
WARNING! Hazardous process gases.
The vacuum system may contain hazardous gases which can be detri-
mental for your health.
Always wear a gas mask, gloves and industrial clothing with long
sleeves when opening parts of the vacuum system. Read the safety data
sheets for the gases and follow all instructions.
Pump side Vacuum side
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