crius_II_en_00, Edition 06/2010
28 CONFIDENTIAL AIXTRON - Dokumentation
Safety System Manual
Danger areas for maintenance and service personnel CRIUS II
2
2.5.3 Dangers originating from hazardous gases
Fig. 2-4 Danger areas for maintenance and service personnel: Process gases
A Gas mixing cabinet
B Reactor cabinet
WARNING! Hazardous process gases.
Improper use of hazardous process gases poses numerous dangers
which may lead to serious or fatal personnel injuries.
Strictly adhere to the following safety measures:
• Guide the exhaust lines to a suitable scrubber to prevent hazardous
gases or vapor from escaping into the environment
• Make sure that the process gas pipes are tight
• Make sure that all manual valves are in the correct position before
you start the system
• Carefully read the safety data sheets for the involved process gases.
Adhere to all prescribed protective measures.
WARNING! Hazardous process gases.
The vacuum system may contain hazardous gases which can be detri-
mental for your health.
Always wear a gas mask, gloves and industrial clothing with long
sleeves when opening parts of the vacuum system. Read the safety data
sheets for the gases and follow all instructions.
To Next Page
Loading...