AIXTRON CRIUS II - Actions Inside of the Glove Box; Preparing for a Process

AIXTRON - Dokumentation CONFIDENTIAL 127
5
crius_II_en_00, Edition 06/2010
System Manual Operation
CRIUS II Preparing for a process
5.8 Preparing for a process
5.8.1 Actions inside of the glove box
The actions inside of the glove box are performed by means of the installed
gloves. See Fig. 5-28,  127.
Fig. 5-28 Using the gloves
NOTE:
For reasons of hygiene, you should put on clean room gloves before
slipping into the gloves installed in the glove box.
We also recommend you to wear clean room glove on top of the installed
gloves. This prevents contamination of the samples.
NOTE:
Do not use the gloves while opening or closing the reactor lid. The light
barriers installed inside of the glove box would interrupt the opening or
closing procedure when you reach into the active area of a light barrier.