AIXTRON CRIUS II - Gloves; Main Switch for Components of the Glove Box; Operating Elements: Glove Box

AIXTRON - Dokumentation CONFIDENTIAL 115
5
crius_II_en_00, Edition 06/2010
System Manual Operation
CRIUS II Operating elements: Glove box
5.2 Operating elements: Glove box
5.2.1 Main switch for components of the glove box
The main switch for the glove box components is located in the reactor cabi-
net. It switches on the components used for controlling the glove box and the
reactor (e.g. pressure control unit, glove box control).
Fig. 5-6 Main switch for components of the glove box
5.2.2 Gloves
Three gloves are installed at the front and the back side of the glove box. Use
the gloves to perform work inside of the glove box, such as loading substrates
into the reactor.
For maintenance work, you can open the glove box at the front side or rear
side using the handles.
Fig. 5-7 Gloves
A Handle
B Lock