AIXTRON CRIUS II - Introduction

crius_II_en_00, Edition 06/2010
100 CONFIDENTIAL AIXTRON - Dokumentation
Installation System Manual
Introduction CRIUS II
4
4.1 Introduction
This chapter contains general guidelines for installation of the CRIUS II and
provides directions for set-up, connection and function checks.
Unless otherwise stated in the sales contract, the responsibilities are regu-
lated as follows:
The end user of the CRIUS II is responsible for:
• Unpacking the system
• Factory-internal transport of the system to the intended installation location
• Providing the supply connections (water, power, pneumatic supply etc.)
and the exhaust system in accordance with the order and the order confir-
mation
AIXTRON is responsible for:
• Setting up and starting up the system
• Testing the system (including the acceptance report)
NOTE:
Only specially trained AIXTRON service technicians are permitted to
install and to commission the CRIUS II. Other persons are not allowed to
perform these tasks.