AIXTRON CRIUS II - Checking the Working Pressure; Pneumatic Maintenance Unit; Pneumatic System

AIXTRON - Dokumentation CONFIDENTIAL 169
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Pneumatic system
6.12 Pneumatic system
6.12.1 Pneumatic maintenance unit
Fig. 6-30,  169 shows the pneumatic maintenance unit. It supplies the pneu-
matic components of the CRIUS II via EPV valves.
For more information refer to the related OEM manual.
Fig. 6-30 Pneumatic unit for the glove box
A shut-off valve
B Pressure switch
C Filter regulator
6.12.2 Checking the working pressure
1 Check the working pressure at the manometer. See Fig. 6-31,  169.
• The pressure must be set to 6 bar
2 If necessary, set the pressure to 6 bar by means of the filter regulator
Fig. 6-31 Checking the working pressure
A Filter regulator
B Manometer