crius_II_en_00, Edition 06/2010
184 CONFIDENTIAL AIXTRON - Dokumentation
Storage, disposal System Manual
Storage CRIUS II
7
7.1 Storage
7.1.1 Deactivating the system
1 Switch the system off. See Chapter 5.7.2 Switching off, 126.
2 Blow out all water circuits. For this purpose, use compressed air at a
pressure of p < 1.5 bar (22 psi). This protects the water circuit from cor-
rosion. In addition, this measure protects the water circuit from damage
caused by freezing when the temperature drops below 0 °C.
3 Blow out the pneumatic circuit with compressed air. This removes any
condensation water.
4 Switch off the mains and disconnect the system from the mains supply
5 Disconnect all media supply lines
6 Cover the system with plastic sheeting to protect it from dust
7.1.2 Storage conditions
The CRIUS II may only be stored in its original packing units. The storage
environment must fulfill the following conditions:
Tab. 7-1 Storage conditions
Temperature 10…50 °C
Relative humidity 30…80 % (non-condensing)
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