AIXTRON CRIUS II - Tungsten Heater

AIXTRON - Dokumentation CONFIDENTIAL 65
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Reactor
3.5.3 Tungsten heater
The system is heated by a three zone tungsten heater. See Fig. 3-11,  65.
The heater is located inside of the susceptor support below the susceptor.
Fig. 3-11 Tungsten heater
A Heater coils
Heater coils The heater consists of three sets of tungsten-rhenium coils which are config-
ured as follows:
• Zone A: Center
• Zone B: Middle
• Zone C: Outside
Fig. 3-12 Heater coils
A Zone A: Center
B Zone B: Middle
C Zone C: Outside
Each zone may be individually replaced. Power is fed through the ferrofluidic
feedthrough.