AIXTRON CRIUS II - Maintenance Schedule: Cooling Water System; Maintenance Schedule: Gas Mixing System; Maintenance Schedule: Pneumatic System

AIXTRON - Dokumentation CONFIDENTIAL 141
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Maintenance schedule
6.3.8 Maintenance schedule: Pneumatic system
Tab. 6-9 Maintenance schedule: Pneumatic system
6.3.9 Maintenance schedule: Gas mixing system
Tab. 6-10 Maintenance schedule: Gas mixing system
6.3.10 Maintenance schedule: Cooling water system
Tab. 6-11 Maintenance schedule: Cooling water system
Action Interval Comments
Date and signa-
ture
Checking the pneumatic tub-
ing,
if necessary replace defective
hoses
Quaterly
Checking the working pres-
sure
Quaterly See Chapter 6.12.2,  169
Checking the pressure switch Quaterly See Chapter 6.12.3,  170
Checking the EPV valves Yearly See Chapter 6.12.4,  170
Action Interval Comments
Date and signa-
ture
Replacing a bubbler Depends on
consumption
See Chapter 6.13.1,  171
and Chapter 6.13.2,  173
Checking the communication Daily, during
operation
See Chapter 6.13.3,  175
Performing a zero offset of a
MFC
Quaterly See Chapter 6.13.4,  176
Performing a leak test of the
complete system
Quaterly See Chapter 6.11.6,  168
Perform the leak test accord-
ing to the SEMI standard
Action Interval Comments
Date and signa-
ture
Checking the water pressure Weekly See Chapter 6.14.1,  178
Cleaning the water filter Quaterly See Chapter 6.14.2,  179
Checking the water flows Before start-
ing a process
run
See Chapter 6.14.3,  180