AIXTRON CRIUS II - Hot Surface

crius_II_en_00, Edition 06/2010
50 CONFIDENTIAL AIXTRON - Dokumentation
Safety System Manual
Safety labels on the CRIUS II CRIUS II
2
2.12.3 Hot surface
Label 1
Position • On the outer lock chamber door
Fig. 2-19 Label on the outer lock chamber door
Label 2
Position • Inside of the glove box on the inner door of the load lock
Fig. 2-20 Label on the inner lock chamber door
100093732
Hot surfaces within this area.
Contact may cause burns.
Do not touch. Use appropriate tools
during loading/unloading procedure.
WARNING
99110109
Hot surfaces inside the
glove box.
Contact may cause burns.
Do not touch.
WARNING