AIXTRON CRIUS II - Checking the O-Rings

crius_II_en_00, Edition 06/2010
162 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Reactor CRIUS II
6
6.10.3 Checking the O-rings
Checking the O-
rings
1 Raise the reactor lid. See Chapter 6.10.2.1 Opening the reactor lid,
 160.
2 Visually check the O-rings for damage
3 Raise the reactor chamber. See Chapter 6.10.2.2 Opening the reactor
chamber,  161.
4 Visually check the O-rings for damage
Replacing the O-
rings
1 Replace defective O-rings as follows:
1.1 Remove the defective O-ring with plastic tweezers
1.2 Carefully install the new O-ring
2 In case of a large O-ring, proceed as follows:
2.1 Fit the O-ring at the 3 o’clock and 9 o’clock positions
2.2 Then fit the 12 o’clock and 6 o’clock positions
2.3 Smooth the O-ring in the intermediate positions to avoid stretch-
ing and distorting the O-ring