AIXTRON CRIUS II - Auxiliary Devices; Auxiliary Devices and Used Materials; Contaminated Parts

AIXTRON - Dokumentation CONFIDENTIAL 135
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Auxiliary devices and used materials
6.2 Auxiliary devices and used materials
6.2.1 Auxiliary devices
• Standard tool box, see Fig. 6-1,  135.
• Standard safety equipment
The end user is responsible for providing a standard state-of-the-art safety
equipment as required for any work on contaminated systems
• Clean and lint-free clean room gloves
• Industrial vacuum cleaner
Fig. 6-1 Standard tool box
6.2.2 Contaminated parts
Components which contact process gases must be treated as contaminated
parts, e.g.:
• Gas pipes
• Vacuum system parts like valves, MFCs, etc.
• Bubblers
• Gas cylinders
WARNING! Contaminated parts.
The CRIUS II contains contaminated parts which may impair your health.
Wear protective gloves and industrial clothing with long sleeves. Read
the safety data sheets and follow all instructions.