AIXTRON CRIUS II - Cooling Water

crius_II_en_00, Edition 06/2010
14 CONFIDENTIAL AIXTRON - Dokumentation
Use, data System Manual
Installation data CRIUS II
1
1.6.4 Cooling water
Dew point diagram
Fig. 1-4 Dew point diagram
T
1
Room temperature
T
2
Minimum cooling water temperature
rH Relative humidity
NOTE:
Prevent condensation! The temperature of the cooling water must
exceed the dew point of the ambient air by at least 2
°C. See Fig. 1-4,
 14.
10 15 20 25 30 35 40
20
25
30
35
40
45
50
55
60
65
100 %
90 %
80 %
70 %
60 %
50 %
40 %
30 %
20 %10 %
T [°C]
1
T [°C]
2
rH