AIXTRON CRIUS II - Page 15

AIXTRON - Dokumentation CONFIDENTIAL 15
1
crius_II_en_00, Edition 06/2010
System Manual Use, data
CRIUS II Installation data
Cooling water quality
The following table lists the requirements for cooling water flowing through cir-
cuits with and without aluminum components.
Tab. 1-3 Water quality
*) cfu = colony forming units
NOTE:
Treat the cooling water with biocide to avoid excessive microbiological
concentration.
Circuit with Al components
Circuit without Al compo-
nents
pH 7.5 … 8.0 7.0 … 8.0
German hardness < 7.5 °dH < 7.5 °dH
US hardness < 0.05 ppm < 0.05 ppm
Total dissolved solids 1…2 ppm 10 ppm
Oil content < 1 ppm < 1 ppm
Micro biologicals < 10
2
cfu *) < 10
2
cfu *)
Conductivity at 25 °C 2…25 µS/cm < 110 µS/cm
Resistivity at 25 °C 40…500 kΩcm
Concentration of inorganic ions
Chloride < 0.5 ppm < 10 ppm
Sulfate < 20 ppm < 25 ppm
Nitrate < 0.1 ppm
Cyanide < 12 ppm
Sodium < 0.5 ppm < 0.3 ppm
Calcium 0.6 ppm 0.6 ppm
Magnesium 0.1 ppm 0.1 ppm
Potassium 0.3 ppm 0.3 ppm
Silicate < 0.1 ppm < 1.0 ppm
Copper < 30 ppb
Aluminum < 1 ppm
Ammonia < 1.7
× 10
-3
ppm
Oxygen < 20 ppm
Ozone < 0.1 ppm