AIXTRON CRIUS II - Purge Gas Lines

AIXTRON - Dokumentation CONFIDENTIAL 73
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Gas system
3.6.3 Purge gas lines
The following purge lines are provided to eliminate dead volumes within the
reactor chamber:
• Showerhead purge
To purge the showerhead during wafer loading and maintenance
• Viewport/optical purge
To purge each of the optical access ports
• Skirt purge
To assist gas flow over the edge of the susceptor to the exhaust
• Liner purge
To purge the annulus between the reactor wall and the liner
• Heater purge
To purge the heater area and prevent the ingress of toxic and/or corrosive
materials into the ferrofluidic seal area.
Fig. 3-21,  73 shows the corresponding gas diagram.
Fig. 3-21 Purge gas lines
A
C
D
B
E
PV
PV
PV
PV
F
G
H
I
N
2
H
2
A Purge Panel
B Showerhead
C Reactor
D Feedthrough
E Showerhead purge
F Optical purge
G Skirt purge
H Liner purge
I Heater purge